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characterization of vibration modes in piezoelectrically transduced MEMS resonators using laser interferometry
characterization of vibration modes in piezoelectrically transduced MEMS resonators using laser interferometry
2009
Olli Holmgren
Kimmo Kokkonen
Antti Jaakkola
Samuli Asmala
James Dekker
A. Nurmela
Tuomas Pensala
Tommi Riekkinen
Tomi Mattila
Ari Alastalo
Matti Kaivola
Keywords:
Normal mode
Laser
Interferometry
Electronic engineering
Microelectromechanical systems
Resonator
Materials science
Optoelectronics
laser interferometry
Correction
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