Interfacial Stability and Surface Morphology in Layer-By-Layer Semiconductor Heteroepitaxy Luis

A theoretical analysis based on continuum elasticity theory and atomistic simulations is presented of the interfacial stability with respect to misfit dislocation formation and of the film surface morphology during layer-by-layer growth semiconductor heteroepitaxy. The strain in the coherently strained films, the energetics of a transition from a coherent to a semicoherent interface consisting of misfit dislocation arrays or networks, and the morphological details of the film surface profile are calculated for InAs/GaAs(110) and InAs/GaAs(111)A. The analysis is presented for the general case of heteroepitaxy on a finite-thickness compliant substrate. The results are discussed in the context of recent experimental data.