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Efficient finite-element Green's function approach for CD metrology of 3D gratings on multilayer films.
Efficient finite-element Green's function approach for CD metrology of 3D gratings on multilayer films.
2005
Yia Chung Chang
Guangwei Li
Hanyou Chu
Jon L. Opsal
Keywords:
Green's function
Rigorous coupled-wave analysis
Metrology
Optics
Critical dimension
Finite element method
Physics
Plane wave
Materials science
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