Room Temperature Pt-Modified WO 3 /p–Si Film Gas Sensor for Detection of Methanol

In this proposed work, room temperature fast response and recovery Pt-modified WO3/p–Si and WO3 device sensors were fabricated using sol–gel method for the influence of methanol gas concentrations. Two different types of sensors have been fabricated for sensing of methanol concentration in the temperature range of 25–45 ℃. TEM, XRD, and FESEM are useful for exploring the structural property and the surface property of Pt–WO3 and WO3 thin film. Gas-sensing response is observed at the room temperature range. It was observed that Pt-modified WO3/p–Si thin film with Al presents higher response as compared to unmodified WO3/p–Si thin film.