Evaluation apparatus and evaluation method

PROBLEM TO BE SOLVED: To provide an evaluation device specifying a cause of an abnormality of a repeated pattern. SOLUTION: In this evaluation device 1, a first imaging element 31 rotates an optical analyzer 21 so that the azimuth of a transmission axis of the optical analyzer 21 becomes equal to a tilt angle of 90°±3° with respect to a transmission axis of a polarizer 17, and a Fourier image is imaged in each condition, and an operation processing part 40 detects a state change of a repeated pattern 3 caused by a change of a dose amount based on a difference of signal intensity between two Fourier images, and detects a state change of the repeated pattern 3 caused by a focus change, based on an average of the signal intensity between the two Fourier images. COPYRIGHT: (C)2010,JPO&INPIT