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N-type silicon conductivity conversion under the action of high-speed helium ions
N-type silicon conductivity conversion under the action of high-speed helium ions
1974
Yu. V. Bulgakov
S.M. Razumovskij
E. A. Ignatova
Keywords:
Semimetal
Materials science
Molecular physics
Crystal structure
Charged particle
Ion
Conductivity
Crystallographic defect
Silicon
Electrical resistivity and conductivity
Correction
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