Characteristics and compensation of the thickness effect in quantitative NEXAFS measurements

The distortion of transmission spectra by the combination of monochromator band pass and sample attenuation has been modeled and characterized for soft x-ray energies. The model was used to predict the distortion to the transmission spectrum of CO2 as obtained with a monochromator of moderate band pass. Experimental measurements of the CO2 spectrum at a range of concentrations were used to confirm the validity of the model. The application of the model to overcome band pass and thickness distortions to the quantitative measurement of mass absorption coefficients and mass thickness are discussed.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.