Silicon science and advanced micro-device engineering

This special issue contains the proceedings of a joint meeting of the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), organized by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center, Gunma University, held on the 10th and 11th of December 2009 in Kiryu, Japan. The scope of these proceedings encompasses: Materials Science, Chemical Science and Technology, Nano-Science and Technology, Photonics Devices and Technology, Novel Measurement and System Technology, and Information and Communication Engineering. This work thus constitutes an essential guide to the current thinking in this subject area.