Magnetron sputtering vacuum chamber intake means and the magnetron sputtering apparatus

A magnetron sputtering apparatus and a vacuum chamber of the intake air using the intake device magnetron sputtering apparatus, the magnetron sputtering apparatus includes a vacuum chamber inlet for receiving mixed gas and the mixed gas cartridge, the gas is passed through the vacuum chamber and the intake box connected to both the connecting pipe, the gas mixing box having one or more intake pipe. The uniformity of the distribution of the air intake apparatus can increase the gas into the vacuum chamber, the effect of improving the mixing of gas in the gas mixture; gas may also effectively reduce the precision equipment magnetron sputtering in a vacuum chamber during the intake impact, thus extending the life of the equipment.