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Direct Imaging of Microstructural Changes in Si Induced by FIB-Patterning with Si ++ and Ga + Ions
Direct Imaging of Microstructural Changes in Si Induced by FIB-Patterning with Si ++ and Ga + Ions
2011
See Wee Chee
M. Kammler
J. Graham
Fm Ross
Robert Hull
Keywords:
Microstructure
Analytical chemistry
Ion
Materials science
Nanotechnology
direct imaging
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