Concave Low-Loss Total Internal Reflection Mirrors in Indium Phosphide for High Fabrication Tolerance

Joseph A. Summers,Vikrant Lal,Milan L. Mašanović,Nadir Dagli,Daniel J. Blumenthal

Concave Low-Loss Total Internal Reflection Mirrors in Indium Phosphide for High Fabrication Tolerance

2007

Joseph A. Summers
Vikrant Lal
Milan L. Mašanović
Nadir Dagli
Daniel J. Blumenthal

We report on a novel concave total internal reflection mirror fabricated in InP that allows larger mirror size and mask alignment tolerance. Average mirror loss measured was 0.56dB/mirror with a standard deviation of 0.14 dB/mirror.

Keywords:

Photonic integrated circuit
Waveguide (optics)
Finite-difference time-domain method
Optoelectronics
Optics
Plane mirror
Quantum well
Standard deviation
Physics
Indium phosphide
Total internal reflection
Etching
Fabrication

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