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Direct Observation of Negative Capacitance of HfZrO 2 Film for Negative Capacitance FET
Direct Observation of Negative Capacitance of HfZrO 2 Film for Negative Capacitance FET
2017
Nozomu Ueyama
Masaharu Kobayashi
Toshiro Hiramoto
Keywords:
Differential capacitance
Negative impedance converter
Electronic engineering
Capacitance
Ferroelectricity
Materials science
Optoelectronics
direct observation
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