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Performance optimisation of a neon DBD excimer light source operating in the extreme-ultraviolet (84nm)
Performance optimisation of a neon DBD excimer light source operating in the extreme-ultraviolet (84nm)
2009
Robert J. Carman
Barry K. Ward
D. M. Kane
Keywords:
Excimer
Neon
Pulse shaping
Extreme ultraviolet
Energy conversion efficiency
Dielectric barrier discharge
Optoelectronics
Materials science
Optics
Plasma
light source
Correction
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