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Etch Enhanced Low Capacitance, Large Area Thin Film InGaAs Metal-Semiconduc
Etch Enhanced Low Capacitance, Large Area Thin Film InGaAs Metal-Semiconduc
2004
Sang-Woo Seo
Cheolung Cha
Sang-Yeon Cho
Sa Huang
Nan Marie Jokerst
Martin A. Brooke
April S. Brown
Keywords:
Thin film
Capacitance
Electronic engineering
Materials science
Composite material
Metal
Optoelectronics
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