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A facility to study the particles released by ion sputtering process
A facility to study the particles released by ion sputtering process
2007
E. de Angelis
A. M. Di Lellis
Giuliano Vannaroni
Stefano Orsini
Valeria Mangano
A. Milillo
Stefano Massetti
Alessandro Mura
N. Vertolli
Keywords:
Chemical engineering
Materials science
ion sputtering
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