End block assembly and socket assembly
2014
A socket assembly (102, 152, 202, 302, 402, 452, 502, 602, 702) for holding an end block (104) in a process chamber may comprise according to various embodiments: a first base member (312) having a first mounting assembly (110 ) for securing the first base member (312) at a process chamber wall, and (with a second fastening arrangement 102a); and a second base member (322) having a first mounting assembly (102b), for securing said second base element (322) on the first base element (322) and with a second fastening arrangement (120) for attaching an end block (104) to the second base element ( 322); wherein the second mounting arrangement (102a) of the first base member (312) and the first mounting assembly (102b) may be formed to the second base member (322) for interlocking with play that the second base element (322) to the first base element (312 relatively ) may be deflected.
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