Computer simulation of plasma sheath evolution in plasma source ion implantation near a cylindrical bore

A one-dimensional fluid dynamic model of PSII for collisionless plasma was set up.The ion dynamics in a cylinder-shaped container with or without auxiliary electrode was calculated using this fluid model and the potential,ion density and ion dynamics in the sheath were obtained.The calculation of the ion flux and ion dose among the inner surface showed the existence of the different density,flux and dose distribution at any time.