Experiments on micromanipulation using adhesion forces in unconstained environment

In this paper, we propose an original design for a manipulation system of rigid micro-objects by adhesion (50 pm - 200 pm) in open air. The design is based on a precise analysis of the mechanical conditions for manipulation by adhesion. Simulations using a dynamic m.odel of a canonical manipulation (capture and release of micro-objects) have shown that it exists an end- effect or in it ial acceleration” win do ws for which manipulations are possible. The end-effector we have developed integrates a highly sensitive contact sensor and two piezo-accelerators (- 1Q6 m.~-~). Successful m,anipulations by adhesion of silicon chips with a gold coated piezoresistive silicon cantilever have been carried out and are presented as conclusion of this pa