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Self-aligned integrated nanostructures fabricated by UV-nanoimprint lithography
Self-aligned integrated nanostructures fabricated by UV-nanoimprint lithography
2017
Praveen Joseph
Keywords:
Nanostructure
Photolithography
Stencil lithography
Nanoimprint lithography
Nanotechnology
Lithography
Multiple patterning
Next-generation lithography
Materials science
Semiconductor
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