Phase Distribution and Stresses in the Coating Deposited from Plasma

The heat and kinetic phenomena accompanying the carbide coating growth during deposition from plasma are investigated numerically. The coupling model taking into account some cross-effects between fields of various physical natures was used here. The phase, elements distribution, stresses and strains in the growing coating and substrate of cylindrical form where calculated. It is demonstrated that interrelation between diffusion and deformation plays a significant role for coating composition change.