The analysis of optical lithography at 2-dimensional dense structure
2008
New concepts about transistor structure are being introduced for sub-50nm memory products. As the memory cell
design is shrinking down, conventional transistor of planar structure can not guarantee safe transistor operation.
Newly introduced transistor has to ensure robust transistor operation characteristics and process stability
simultaneously. One of the candidates which are being developed recently is vertical transistor. The basic layout to
integrate vertical transistor include very dense 2-dimensional features. The new memory cell based on dense structure
can also contribute to reduction of cell area compared to conventional memory cell such as 8F2 planar cell. While new
memory structure enables the reduction of chip size, its 2-dimensional structure limits resolving performance of optical
lithography inevitably. It is very challenging to build 4F2 dense features of sub-50nm node by single exposure
technology using hyper NA ArF lithography before the EUV era. In this paper, the feasibility of 2-dimensional dense
structure at 50nm node is presented and various techniques are introduced to realize new memory scheme as next
generation memory cell structure.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI