FEM simulation of Surface Acoustic wave (saw) device for sensing applications

The massive demand by industry to different kind of gas sensors or radiofrequency devices, leads to the need to high sensitivity, high electromechanical coupling electroacoustic devices using novel materials and adequate configurations. This paper aims to the modeling of surface acoustic wave (SAW) based Si/3C-SiC/AlN delay line using finite element approach. The modal analysis allow the extraction of phase velocities, reflectivity and electromechanical coupling factor for different h/λ values, that are of interest before manufacturing process of electroacoustic devices. By optimizing these parameters, high performance and high quality, SAW devices could be fabricated and used in telecommunication or in integrated sensing systems.