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Influences of Process Temperature on a Phase of Ga2O3 Thin Films Grown by Atomic Layer Deposition on Sapphire
Influences of Process Temperature on a Phase of Ga2O3 Thin Films Grown by Atomic Layer Deposition on Sapphire
2020
Seung-Hyun Lee
Kang Min Lee
Sang-Woon Lee
Keywords:
Atomic layer deposition
Sapphire
Optoelectronics
Thin film
Materials science
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