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Chemical vapor deposition of Mo, Re, and Ta films
Chemical vapor deposition of Mo, Re, and Ta films
1999
O. Yu. Goncharov
R. R. Faizullin
M. G. Shadrin
M.F. Kanunnikov
Keywords:
Transition metal
Inorganic chemistry
Hybrid physical-chemical vapor deposition
Chemical vapor deposition
Combustion chemical vapor deposition
Molybdenum
Rhenium
Tantalum
Chemistry
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