Investigation of incredible high performance surface acoustic wave properties with a structure of IDT/Θ 0 YX-LiTaO 3 /SiO 2 /AlN/Silicon

Recently, an Incredible High Performance (IHP) SAW structure was released by Murata Co., Ltd, which is composed by a combination of thin piezoelectric material with a Bragg reflector stack. Such structure can concentrate the energy of leaky SAW, and achieve a higher quality factor and coupling factor of SAW resonators. In this paper, we have investigated such kind of IHP SAW with a structure of IDT/ θ° YX-LiTaO 3 /SiO 2 /AlN/Silicon for deep understanding of the SAWs propagating characteristics. We have calculated the relative input admittance of the IHP SAW propagating on 42° YX-LiTaO 3 /SiO 2 /AlN/Silicon. We have calculated displacement filed distributions for the main and spurious modes, and evaluated the electro-mechanical coupling coefficient (K 2 ), velocities at resonance frequency (V r ) and anti-resonance frequency (Va) with different electrode materials and metal thickness. Such performance was also optimized by changing the structure parameters of piezoelectric layer thickness and Euler angle.