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Recent progress on non-thermal plasma technology for high barrier layer fabrication
Recent progress on non-thermal plasma technology for high barrier layer fabrication
2018
Haibao Zhang
Lijun Sang
Zhengduo Wang
Zhongwei Liu
Lizhen Yang
Qiang Chen
Keywords:
Nonthermal plasma
Barrier layer
Analytical chemistry
Chemistry
Fabrication
Optoelectronics
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