17.9% E-ciency Silicon Solar Cells by Using Spin-on Films Processes

We investigated the phosphorus difiusion process by using the spin-on fllm (SOF) and optimized rapid temperature annealing (RTA) techniques on single crystalline p-Si wafer to form a high-quality thin n + -Si emitter. We also studied a broad-band low-re∞ectance multi- layer (SiO2/TiO2/TiO2) AR-coating by using the SOF process. Furthermore, we successfully integrated both SOF processes for fabricating an n + -p Si solar cell with excellent photovoltaic performances. The improved performances show that Voc of 0.56V, Isc of 5.35mA, FF of 78.46%, and · of 17.91% are obtained.