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Reactive Ion Etching Characterization of a-Si:H and a-SiC:H Thin Films
Reactive Ion Etching Characterization of a-Si:H and a-SiC:H Thin Films
1995
S. La Monica
Giovanni Saggio
Keywords:
Composite material
Dry etching
Thin film
Reactive-ion etching
Materials science
amorphous semiconductors
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