Flexible three-dimensional force touch sensor based on piezoresistive and capacitive combination

The invention discloses a flexible three-dimensional force touch sensor based on a piezoresistive and capacitive combination. The flexible three-dimensional force touch sensor is characterized in that a three-dimensional force sensing component having a compact structure is formed by an elastic substrate used for supporting, a lower layer of a flexible circuit, a three-dimensional force sensing array filled with a flexible filler at the periphery, an upper layer of the flexible circuit, and an elastic bulge layer used for protecting. Each three-dimensional force sensing unit is synchronously integrated with a vertical force sensing strain gage and four groups of vertical induction capacitors, which are respectively sensitive to vertical normal force and horizontal tangential force. The flexible three-dimensional force touch sensor has the characteristics of excellent static nature and dynamic nature, and capability of reducing the interference of a capacity coupling, which is caused by the outside surface metal, on measurement and realizing the precise measurement of the three-dimensional force, and can be applied to electromechanical devices, such as artificial limbs and manipulators.