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New Industrial System for In-Line Deposition of SiN:H on Solar Wafers
New Industrial System for In-Line Deposition of SiN:H on Solar Wafers
2011
M. Stroisch
J.-U. Fuchs
Moritz Heintze
T. Rechtsteiner
C Beck
Roland Dahl
P. Fath
Keywords:
Silicon nitride
Metallurgy
Wafer
Materials science
Optoelectronics
industrial systems
Deposition (law)
Correction
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