Thermal Analysis and Simulation of MEMS Thermal Actuator for Food Industry

Micro-actuator technology is important base of design and fabrication MEMS. According to a kind of bimorph thermal actuator, this paper obtains the thermal deflection and temperature distribution of MEMS thermal actuator by using finite element analysis. The relationship between the thermal deflection and some parameter such as length of flexure are analyzed in detail. Through simulation comparison, the influences of the length of flexure on thermal deflection and fatigue life are verified, which provides a good guide for the design of MEMS thermal actuator further.