Influence of ion implantation on the quality of 4H-SiC CVD epitaxial layers

Abstract The effect of ion implantation doping (ID) with high doses of Al followed by short high-temperature annealing of n-type 4H-SiC epitaxial layers grown by chemical vapor deposition (CVD) has been studied. The comparative investigations of the structural and electrical properties, lateral and as a function of depth, in the CVD layers before and after Al ID p + n junction formations were determined by several different methods. Structural improvement of the CVD epitaxial layers close to Al ID p + n junction positions was revealed for the first time.