Novolak/polyhydroxystyrene copolymer and photoresist compositions
1994
A novolak/polyhydroxystyrene copolymer having a structure as shwon in formula (I), in which R = H, -CH3, -CH2CH3 or -CH2CH2CH3, n = 2 to 15, a process for producing such a copolymer, a photoresist composition containing such a copolymer, a process for producing such a photoresist and a process for producing a semiconductor device using such a photoresist.
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