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Spectroscopic ellipsometry characterization of GaN surface exposed to NH 3 plasma
Spectroscopic ellipsometry characterization of GaN surface exposed to NH 3 plasma
2019
Naoto Kumagai
Hirotomo Itagaki
Jaeho Kim
Hisato Ogiso
Xue-Lun Wang
Shingo Hirose
Hajime Sakakita
Mitsuaki Shimizu
Keywords:
Ellipsometry
Plasma
Analytical chemistry
Materials science
nitride semiconductors
spectroscopic ellipsometry
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