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A MEMS-based device used for alignment and manipulation of MLL x-ray focusing optics
A MEMS-based device used for alignment and manipulation of MLL x-ray focusing optics
2015
Weihe Xu
Kenneth Lauer
Hui Yan
Veljko Millanovic
Evgeny Nazaretski
Keywords:
Nanotechnology
Optics
Optoelectronics
Microelectromechanical systems
Materials science
X-ray
Correction
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