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Study of Piezo-resistive Accelerometer using Full Minimal Fab
Study of Piezo-resistive Accelerometer using Full Minimal Fab
2021
Hiroshige Kogayu
Hiroyuki Tanaka
Fumito Imura
Sommawan Khumpuang
Shiro Hara
Keywords:
Accelerometer
Materials science
Resistive touchscreen
Microelectromechanical systems
Optoelectronics
Correction
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