Raman studies of amorphous carbon thin films

In this work we perform the results of study of thin amorphous carbon films (a-C) synthesized by magnetron sputtering of graphite target at direct current in argon atmosphere. Analyzing experimental data, we revealed the dependence between a-C films structure and substrate temperature. Local structure was studied by Raman spectroscopy. The position of G peak varied from 1545 cm −1 to 1570 cm −1 . To consider results of Raman spectroscopy in details we applied Gaussian decomposition method. Analysis of obtained data showed that an increase in substrate temperature results in transformation of structure from diamond-like to graphite-like.