Hydrogen depth profiling using18O ions

Nuclear resonant reaction analysis techniques for hydrogen depth profiling in solid materials typically have used15N ion beams at 6.40 MeV and19F ion beams at 6.42 MeV, which require a tandem accelerator. We report a new technique using an18O ion beam at a resonance energy of 2.70 MeV, which requires only a single stage accelerator. Improved values of the nuclear parameters for the 2.70 MeV (18O) and 6.40 MeV (15N) resonances are reported. The beam energy spread was investigated for different ions and ion charge states and found to scale with the charge state. Data obtained using atomic and molecular gas targets reveal the research potential of Doppler spectroscopy. Examples of hydrogen depth profiling in solid materials using15N and18O ion beams are presented.