一种光学系统鬼像测量装置及其测量方法 | Ghost image measuring device of optical system and measuring method thereof

本发明提供一种光学系统鬼像测量装置，沿光路依次设置有光源、扩束准直系统、双路旋转式轴向指向可调分光系统和待测光学系统；双路旋转式轴向指向可调分光系统包括分光组件、旋转组件、轴向伸缩组件、折轴镜、指向调整组件和支撑组件；分光组件设置于轴向伸缩组件的一端，指向调整组件设置于轴向伸缩组件的另一端；折轴镜安装于指向调整组件上；旋转组件带动轴向伸缩组件、分光组件、折轴镜及指向调整组件旋转。使用分光棱镜的特性，将一束准直扩束光束分为两路，通过双路旋转式轴向指向可调分光系统，可实现分光光路绕透射光轴夹角锥面旋转，得到待测光学系统的三维空间鬼像位置的分布。 | The invention provides a ghost image measuring device of an optical system. A light source, a beam expanding and collimating system, a two-way rotary type axially-directed adjustable beam splitting system and a to-be-tested optical system are sequentially arranged along an optical path. The two-way rotary type axially-directed adjustable beam splitting system comprises a light splitting assembly, a rotating assembly, an axial telescopic assembly, an elbow refractor, a pointing adjustment assembly and a supporting assembly. The light splitting assembly is arranged at one end of the axial telescopic assembly. The pointing adjustment assembly is arranged at the other end of the axial telescopic assembly. The elbow refractor is arranged on the pointing adjustment assembly. The rotating assembly drives the axial telescopic assembly, the light splitting assembly, the elbow refractor and the pointing adjustment assembly to rotate. Based on the characteristics of a beam splitting prism, a collimating and beam expanding light beam is divided into two ways. By means of the two-way rotary type axially-directed adjustable beam splitting system, the light splitting path is enabled to rotate around a conical surface at the included angle of a transmission optical axis, so that the position distribution of the 3D ghost image of the to-be-tested optical system can be obtained.