Deposition of diamondlike carbon films using XeCl excimer laser

Diamond-like carbon (DLC) films were deposited using the laser-assisted physical vapor deposition (LPVD) method. This work is dedicated to an XeCl-excimer laser PVD procedure. The influences of the power density, working distance, and substrate temperature on the DLC-deposition are discussed. The propagation velocity of the laser ignited plasma was determined using short-time photography and time-of-flight (TOF) method.