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Conductivity and Structural Properties of Nanostructures Fabricated by E-Beam Exposure of Nanoparticle Resists
Conductivity and Structural Properties of Nanostructures Fabricated by E-Beam Exposure of Nanoparticle Resists
2010
Stefan Dickert
Myoung-Hwan Park
Yuval Ofir
Qijun Xiao
Tianyu Yang
Bappaditya Samanta
Vincent M. Rotello
Mark T. Tuominen
Keywords:
Nanostructure
Small-angle X-ray scattering
Nanoparticle
Thin film
Analytical chemistry
Conductivity
Particle size
Resist
Materials science
Optics
Electron beam processing
Nanotechnology
Correction
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