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Processing challenges in the fabrication of advanced MEMS
Processing challenges in the fabrication of advanced MEMS
2004
Avinoam Kornblit
Vladimir A. Aksyuk
Gregory R. Bogart
Cristian A. Bolle
John Eric Bower
Raymond A. Cirelli
E. Ferry
Linus A. Fetter
Arman Gasparyan
Dennis S. Greywall
R. C. Keller
F. Klemens
Warren Y. Lai
Omar Daniel Lopez
W. M. Mansfield
J.F. Miner
C. S. Pai
Flavio Pardo
Stanley Pau
Maria Elina Simon
T. Sorsch
Joseph Ashley Taylor
D. M. Tennant
G. P. Watson
Keywords:
Manufacturing engineering
Fabrication
Microelectromechanical systems
Materials science
Nanotechnology
Engineering
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