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Mechanism and kinetics of silylation of resist layers from the gas phase
Mechanism and kinetics of silylation of resist layers from the gas phase
1987
Robert Jan Visser
Jack P. W. Schellekens
Marian E. Reuhman-Huisken
L.J. Van Ijzendoorn
M. J. Bowden
Keywords:
Chemical engineering
Silylation
Resist
Kinetics
Materials science
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