Carbon Nanotube Precise Assembly for CMOS and NEMS Applications

Keywords: Complementary metal–oxide–semiconductor (CMOS) ; Carbon nanotube (CNT) ; acdielectrophoresis (DEP) ; assembly ; precise-alignment ; CNT field-effect transistor (CNT FET) ; suspended-body ; CNT resonator ; nano-electro-mechanical systems (NEMS) ; CNT NEM switch These Ecole polytechnique federale de Lausanne EPFL, n° 5651 (2013)Programme doctoral Microsystemes et MicroelectroniqueFaculte des sciences et techniques de l'ingenieurInstitut de genie electrique et electroniqueLaboratoire des dispositifs nanoelectroniquesJury: M. Gijs (president), M. Despont, C. Hierold, J. Robertson Public defense: 2013-2-28 Reference doi:10.5075/epfl-thesis-5651Print copy in library catalog Record created on 2013-02-20, modified on 2017-05-10