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Mechanism of Selective Etching of SiGe Layers in SiGe/Si Systems
Mechanism of Selective Etching of SiGe Layers in SiGe/Si Systems
2007
Juri Kato
Hideaki Oka
Kei Kanemoto
Hirokazu Hisamatsu
Yusuke Matsuzawa
Yoji Kitano
Toshiki Hara
Masaki Hoshina
Shun-ichiro Ohmi
Keywords:
Etching
Analytical chemistry
Materials science
Optoelectronics
Correction
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