Processing arrangement and method of manufacturing a process chamber

According to various embodiments, a processing arrangement (100) may comprise: a process chamber (102) having a Prozessierbereich (111) for processing a substrate within the process chamber (102); and a transport system (104) for transporting the substrate by means of a substrate carrier (106), wherein the transport system (104) having a first conveying device (104a) formed on a first side (111a) of the Prozessierbereichs (111) is disposed, and wherein the transport system (104) has a second transport device (104b) disposed on a second side (111b) of the Prozessierbereichs (111) is arranged so that the substrate carrier (106) by means of two transport devices (104a, 104b) in the Prozessierbereich (111) can be transported, wherein the first transport device (104a) and / or the second transport device (104b) in each case at least one support structure (114a, 114b) for supporting and transporting the substrate carrier (106) in the Prozessierbereich (111), each having at least a support structure (114a, 114b) by means of at least two deflection structures (204U) is an endlessly circulating established.