A novel thin film solid oxide fuel cell for microscale energy conversion

A novel approach for the fabrication and assembly of a solid oxide fuel cell system is described which enables effective scaling of the fuel delivery, manifold, and fuel cell stack components for applications in miniature and microscale energy conversion. Electrode materials for solid oxide fuel cells are developed using sputter deposition techniques. A thin film anode is formed by co-deposition of nickel and yttria-stabilized zirconia (YSZ). This approach provides a mixed conducting inter-facial layer between the nickel electrode and electrolyte layer. Similarly, a thin film cathode is formed by co-deposition of silver and yttria-stabilized zirconia. Additionally, sputter deposition of yttria-stabilized zirconia thin film electrolyte enables high quality, continuous films to be formed having thicknesses on the order of 1-2 {micro}m. This will effectively lower the temperature of operation for the fuel cell stack significantly below the traditional ranges at which solid oxide electrolyte systems are operated (600-1000 C), thereby rendering this fuel cell system suitable for miniaturization, Scaling towards miniaturization is accomplished by utilizing novel micromachining approaches which allow manifold channels and fuel delivery system to be formed within the substrate which the thin film fuel cell stack is fabricated on, thereby circumventing the need for bulky manifold components which are not directly scalable. Methods to synthesize anodes for thin film solid-oxide fuel cells (TFSOFCs) from the electrolyte and a conductive material are developed using photolithographic patterning and physical vapor deposition. The anode layer must enable combination of the reactive gases, be conductive to pass the electric current, and provide mechanical support to the electrolyte and cathode layers. The microstructure and morphology desired for the anode layer should facilitate generation of maximum current density from the fuel cell. For these purposes, the parameters of the deposition process and post-deposition patterning are developed to optimize a continuous porosity in the anode layer. The fuel cell microstructure is examined using scanning electron microscopy and the power output generated is characterized through current-voltage measurement. Results demonstrating the generation of electrical current in the temperature range of 200-400 C for a thin film solid oxide fuel cell stack fabricated on a silicon wafer will be presented.