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Reliability study of dielectric less electrostatic actuators : application to MEMS switches.
Reliability study of dielectric less electrostatic actuators : application to MEMS switches.
2008
David Mardivirin
David Bouyge
Arnaud Pothier
Aurelian Crunteanu
Pierre Blondy
Keywords:
Actuator
Dielectric
Electronic engineering
Materials science
Microelectromechanical systems
reliability study
Mechanical engineering
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