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High Performance Metal-Insulator-Metal Capacitors with Er2O3 on ALD SiO2 for RF Applications
High Performance Metal-Insulator-Metal Capacitors with Er2O3 on ALD SiO2 for RF Applications
2011
Thanh Hoa Phung
Dharani Kumar Srinivasan
Philipp Steinmann
R. Wise
Mingbin Yu
Yee Chia Yeo
Zhu Chunxiang
Keywords:
Inorganic chemistry
Capacitor
Chemistry
Analytical chemistry
Metal-insulator-metal
metal insulator metal capacitor
Nanotechnology
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