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Electromechanical Modelling and Stress Analysis of RF-MEMS Capacitive Shunt Switch
Electromechanical Modelling and Stress Analysis of RF-MEMS Capacitive Shunt Switch
2021
Gopichand Ch
Reshmi Maity
K.Srinivasarao
Niladri Pratap Maity
K. Girija Sravani
Keywords:
Materials science
Optoelectronics
Shunt (electrical)
Microelectromechanical systems
Capacitive sensing
Stress (mechanics)
Correction
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